JPH0415229U - - Google Patents
Info
- Publication number
- JPH0415229U JPH0415229U JP5632390U JP5632390U JPH0415229U JP H0415229 U JPH0415229 U JP H0415229U JP 5632390 U JP5632390 U JP 5632390U JP 5632390 U JP5632390 U JP 5632390U JP H0415229 U JPH0415229 U JP H0415229U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- pillars
- boat
- cvd apparatus
- pressure cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5632390U JPH0415229U (en]) | 1990-05-28 | 1990-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5632390U JPH0415229U (en]) | 1990-05-28 | 1990-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415229U true JPH0415229U (en]) | 1992-02-06 |
Family
ID=31580044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5632390U Pending JPH0415229U (en]) | 1990-05-28 | 1990-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415229U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997032339A1 (fr) * | 1996-02-29 | 1997-09-04 | Tokyo Electron Limited | Nacelle de traitement thermique pour plaquette de semi-conducteur |
-
1990
- 1990-05-28 JP JP5632390U patent/JPH0415229U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997032339A1 (fr) * | 1996-02-29 | 1997-09-04 | Tokyo Electron Limited | Nacelle de traitement thermique pour plaquette de semi-conducteur |